Dr. Shinji Nagamachi's Home Page
Welcome to my home page!
My name is Shinji Nagamachi. I am just 60 years old, so the portrait shows myself with a celebration costume.
In 2012, I established a private company named Nagamachi Science Laboratory Co.,Ltd. The aim of the company is to develop an ion beam technology, especially low energy focused ion beam technology which I was developing when I was working in Shimadzu Corporation. After coming back to Japan from England in 2002, the machine I constructed in Shimadzu was still in the company, so I borrowed and transferred it from Keihanna Laboratory to Ion Engineering Research Institute Corporation in 2006. However, I had very little time to use the machine and to develop the low energy beam technology because I had too many tasks and duties in Ion Engineering Research Institute Corporation / Ion Technology Center. Just before 60 years old, commonly the age of retirement, I decided to establish a company for my research in ion beam science and technology without uncomprehending circumstances. Fortunately, Shimadzu was so kind that my company could buy the machine.
The low energy focused ion beam apparatus is the unique machine in the world that has a capability of generating very low energy focused ion beams. Au, Cu, Al, Si, Ge, Fe, etc ion species with 30eV to 20keV energy is available with the machine. There may be two ways to use these beams. One is direct deposition of low energy ion beams. Very high purity deposited film is promised and flexibility in fabrication is excellent. For example, making electrode on a MESA pattern is very easy. The other way is low energy and high dose ion implantation to modify stoichiometry in the surface region. This capability can be applied to generate nano crystals in materials.
Sample fabrications by using this low energy focused ion beam apparatus are commercially available through the company or Ion Technology Center Co.,Ltd. If you are interested in such fabrication, please contact me by e-mail and describe the precise of your experimental plan. I will fix the precise of fabrication and issue a quotation. Basically, no one has opportunity to access the machine directly, because sophisticated operation technique is required and the machine is so fragile. Uncomprehending contact or loose questions about technology or job opportunity from graduated students will be ignored because I am so busy.
If you are interested in low energy focused ion beam technology, please refer to some published papers. A list of papers is shown below.
1) S.Nagamachi, Y.Yamakage, H.Maruno, M.Ueda,
S.Sugimoto, M. Asari and J.Ishikawa :"Focused ion beam
direct deposition of gold", Appl.Phys.Lett. 62 (1993) 2143.
2) S.Nagamachi, Y.Yanakage, M.Ueda, H.Maruno, K.Shinada,
Y.Fujiyama, M.Asari and J.Ishikawa : "Focused ion beam
direct deposition of superconductive thin film",
Appl.Phys.Lett. 65 (1994) 3278.
3) M.Ueda, S.Nagamachi, Y.Yamakage, H.Maruno and J.Ishikawa :
"Low-energy focused ion-beam system for direct
deposition", SPIE 2522 (1995) 397.
4) S.Nagamachi, Y.Yamakage, M.Ueda, H.Maruno and J.Ishikawa :
"Focused ion-beam direct deposition of metal thin
film", Rev.Sci.Instrum. 67 (1996) 2351.
5) S.Nagamachi, M.Ueda, H.Sakakima, M.Satomi and J.Ishikawa :
"Giant magnetoresistance in Co/Cu multilayers fabricated by
focused ion-beam direct deposition", J.Appl.Phys. 80 (1996)
4217.
6) S.Nagamachi, M.Ueda, Y.Yamakage, H.Maruno and J.Ishikawa :
"Optical properties of low energy focused ion beam apparatus
for direct deposition", Rev.Sci.Instrum. 68 (1997) 2331.
7) S.Nagamachi, M.Ueda and J.Ishikawa : "Focused ion beam
direct deposition and its applications",
J.Vac.Sci.Technol.B16(1998)2515
Followings are some copies of OHP for FIBDD presentation.
"Focused Ion Beam Direct Deposition and its Applications"
2. Low energy FIB apparatus for direct deposition
3. Properties of direct deposited films
4. Applications of direct deposition
A focused ion beam direct deposition apparatus I and my collaborators contructed.
If you want to contact me, please send an e-mail to following address .
